Fabrication of Thin-Film LAPS with Amorphous Silicon

Author： Yoshinobu Tatsuo   Schöning Michael J.   Finger Friedhelm   Moritz Werner   Iwasaki Hiroshi  

Publisher： MDPI

E-ISSN： 1424-8220|4|10|163-169

ISSN： 1424-8220

Source： Sensors, Vol.4, Iss.10, 2004-10, pp. : 163-169

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