Experimental Study on the Effects of Alumina Abrasive Particle Behavior in MR Polishing for MEMS Applications

Author： Kim Dong-Woo   Cho Myeong-Woo   Seo Tae-Il   Shin Young-Jae  

Publisher： MDPI

E-ISSN： 1424-8220|8|1|222-235

ISSN： 1424-8220

Source： Sensors, Vol.8, Iss.1, 2008-01, pp. : 222-235

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