Influence of Damping on the Dynamical Behavior of the Electrostatic Parallel-plate and Torsional Actuators with Intermolecular Forces

Author： Lin Wen-Hui Zhao Ya-Pu

Publisher： MDPI

E-ISSN： 1424-8220|7|12|3012-3026

ISSN： 1424-8220

Source： Sensors, Vol.7, Iss.12, 2007-11, pp. : 3012-3026

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