Three Cavity Tunable MEMS Fabry Perot Interferometer

Author： Parashar Avinash   Shah Ankur   Packirisamy Muthukumaran   Sivakumar Narayanswamy  

Publisher： MDPI

E-ISSN： 1424-8220|7|12|3071-3083

ISSN： 1424-8220

Source： Sensors, Vol.7, Iss.12, 2007-12, pp. : 3071-3083

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