The Investigation of a Shape Memory Alloy Micro-Damper for MEMS Applications

Author： Pan Qiang   Cho Chongdu  

Publisher： MDPI

E-ISSN： 1424-8220|7|9|1887-1900

ISSN： 1424-8220

Source： Sensors, Vol.7, Iss.9, 2007-09, pp. : 1887-1900

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