Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

Author： Dai Ching-Liang   Lu Po-Wei   Chang Chienliu   Liu Cheng-Yang  

Publisher： MDPI

E-ISSN： 1424-8220|9|12|10158-10170

ISSN： 1424-8220

Source： Sensors, Vol.9, Iss.12, 2009-12, pp. : 10158-10170

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