In-TFT-Array-Process Micro Defect Inspection Using Nonlinear Principal Component Analysis

Author: Liu Yi-Hung   Wang Chi-Kai   Ting Yung   Lin Wei-Zhi   Kang Zhi-Hao   Chen Ching-Shun   Hwang Jih-Shang  

Publisher: MDPI

E-ISSN: 1422-0067|10|10|4498-4514

ISSN: 1422-0067

Source: International Journal of Molecular Sciences, Vol.10, Iss.10, 2009-11, pp. : 4498-4514

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