A Novel Piezo-Actuator-Sensor Micromachine for Mechanical Characterization of Micro-Specimens

Author： Ladani Leila   Nelson Steven  

Publisher： MDPI

E-ISSN： 2072-666x|1|3|129-152

ISSN： 2072-666x

Source： Micromachines, Vol.1, Iss.3, 2010-12, pp. : 129-152

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