Optimization Strategy for Resonant Mass Sensor Design in the Presence of Squeeze Film Damping

Author： Li Chengzhang   Miller Michele H.  

Publisher： MDPI

E-ISSN： 2072-666x|1|3|112-128

ISSN： 2072-666x

Source： Micromachines, Vol.1, Iss.3, 2010-12, pp. : 112-128

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