Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures

Author: Leo Alfin   Andronenko Sergey   Stiharu Ion   Bhat Rama B.  

Publisher: MDPI

E-ISSN: 1424-8220|10|2|1338-1354

ISSN: 1424-8220

Source: Sensors, Vol.10, Iss.2, 2010-02, pp. : 1338-1354

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Abstract