Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors

Author： Contreras Javier Costa Daniel Pereira Sonia Fortunato Elvira Martins Rodrigo Wierzbicki Rafal Heerlein Holger Ferreira Isabel

Publisher： MDPI

E-ISSN： 1424-8220|10|9|8173-8184

ISSN： 1424-8220

Source： Sensors, Vol.10, Iss.9, 2010-09, pp. : 8173-8184

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