Liquid Encapsulation in Parylene Microstructures Using Integrated Annular-Plate Stiction Valves

Author： Gutierrez Christian A.   Meng Ellis  

Publisher： MDPI

E-ISSN： 2072-666x|2|3|356-368

ISSN： 2072-666x

Source： Micromachines, Vol.2, Iss.3, 2011-09, pp. : 356-368

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