Electrostatic Excitation for the Force Amplification of Microcantilever Sensors

Author: Shokuhfar Ali   Heydari Payam   Ebrahimi-Nejad Salman  

Publisher: MDPI

E-ISSN: 1424-8220|11|11|10129-10142

ISSN: 1424-8220

Source: Sensors, Vol.11, Iss.11, 2011-10, pp. : 10129-10142

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Abstract