Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

Author： Cui Feng   Liu Wu   Chen Wenyuan   Zhang Weiping   Wu Xiaosheng  

Publisher： MDPI

E-ISSN： 1424-8220|11|12|11206-11234

ISSN： 1424-8220

Source： Sensors, Vol.11, Iss.12, 2011-11, pp. : 11206-11234

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