Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry

Author： Guo Tong   Wang Siming   Dorantes-Gonzalez Dante J.   Chen Jinping   Fu Xing   Hu Xiaotang  

Publisher： MDPI

E-ISSN： 1424-8220|12|1|175-188

ISSN： 1424-8220

Source： Sensors, Vol.12, Iss.1, 2011-12, pp. : 175-188

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