Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation

Author： Jian Sheng-Rui   Tseng Yu-Chin   Teng I-Ju   Juang Jenh-Yih  

Publisher： MDPI

E-ISSN： 1996-1944|6|9|4259-4267

ISSN： 1996-1944

Source： Materials, Vol.6, Iss.9, 2013-09, pp. : 4259-4267

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