Dynamic Modeling for the Design and Cyclic Operation of an Atomic Layer Deposition (ALD) Reactor

Author： Travis Curtisha D.   Adomaitis Raymond A.  

Publisher： MDPI

E-ISSN： 2227-9717|1|2|128-152

ISSN： 2227-9717

Source： Processes, Vol.1, Iss.2, 2013-08, pp. : 128-152

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