Remote Driven and Read MEMS Sensors for Harsh Environments

Author： Knobloch Aaron J.   Ahmad Faisal R.   Sexton Dan W.   Vernooy David W.  

Publisher： MDPI

E-ISSN： 1424-8220|13|10|14175-14188

ISSN： 1424-8220

Source： Sensors, Vol.13, Iss.10, 2013-10, pp. : 14175-14188

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