Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces

Author： Koga Yosuke   Kuriyama Reiko   Sato Yohei   Hishida Koichi   Miki Norihisa  

Publisher： MDPI

E-ISSN： 2072-666x|4|1|67-79

ISSN： 2072-666x

Source： Micromachines, Vol.4, Iss.1, 2013-03, pp. : 67-79

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