Stop-flow Lithography to Continuously Fabricate Microlens Structures Utilizing an Adjustable Three-Dimensional Mask

Author: Huang Shih-Hao   Lin Chia-Kai  

Publisher: MDPI

E-ISSN: 2072-666x|5|3|667-680

ISSN: 2072-666x

Source: Micromachines, Vol.5, Iss.3, 2014-09, pp. : 667-680

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Abstract