Characterization of High-k Nanolayers by Grazing Incidence X-ray Spectrometry

Author： Müller Matthias   Hönicke Philipp   Detlefs Blanka   Fleischmann Claudia  

Publisher： MDPI

E-ISSN： 1996-1944|7|4|3147-3159

ISSN： 1996-1944

Source： Materials, Vol.7, Iss.4, 2014-04, pp. : 3147-3159

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