Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

Author： Tseng Jian-Zhi   Wu Chyan-Chyi   Dai Ching-Liang  

Publisher： MDPI

E-ISSN： 1424-8220|14|4|6722-6733

ISSN： 1424-8220

Source： Sensors, Vol.14, Iss.4, 2014-04, pp. : 6722-6733

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