Author： Bommareddi Rami Reddy
Publisher： MDPI
E-ISSN： 2227-7080|2|2|54-75
ISSN： 2227-7080
Source： Technologies, Vol.2, Iss.2, 2014-05, pp. : 54-75
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Abstract
Optical metrology techniques used to measure changes in thickness; temperature and refractive index are surveyed. Optical heterodyne detection principle and its applications for precision measurements of changes in thickness and temperature are discussed. Theoretical formulations are developed to estimate crystal growth rate, surface roughness and laser cooling/heating of solids. Applications of Michelson and Mach-Zehnder interferometers to measure temperature changes in laser heating of solids are described. A Mach-Zehnder interferometer is used to measure refractive index and concentration variations of solutions in crystal growth experiments. Additionally, fluorescence lifetime sensing and fluorescence ratio method are described for temperature measurement. For all the above techniques, uncertainty calculations are included.
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