Experiments and Identification of the Unbalance of Aerostatic Guideways on the Micro-Scale

Author： Chen Dongju   Bian Yanhua   Fan Jinwei  

Publisher： MDPI

E-ISSN： 1424-8220|14|3|4416-4427

ISSN： 1424-8220

Source： Sensors, Vol.14, Iss.3, 2014-03, pp. : 4416-4427

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