A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor

Author： Lee Junwoo   Choi Wook   Yoo Yong Kyoung   Hwang Kyo Seon   Lee Sang-Myung   Kang Sungchul   Kim Jinseok   Lee Jeong Hoon  

Publisher： MDPI

E-ISSN： 1424-8220|14|12|22199-22207

ISSN： 1424-8220

Source： Sensors, Vol.14, Iss.12, 2014-11, pp. : 22199-22207

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