Manufacture of Radio Frequency Micromachined Switches with Annealing

Author： Lin Cheng-Yang   Dai Ching-Liang  

Publisher： MDPI

E-ISSN： 1424-8220|14|1|1680-1690

ISSN： 1424-8220

Source： Sensors, Vol.14, Iss.1, 2014-01, pp. : 1680-1690

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