Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors

Author： Filipovic Lado   Selberherr Siegfried  

Publisher： MDPI

E-ISSN： 1424-8220|15|4|7206-7227

ISSN： 1424-8220

Source： Sensors, Vol.15, Iss.4, 2015-03, pp. : 7206-7227

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