Fabrication of SiNx Thin Film of Micro Dielectric Barrier Discharge Reactor for Maskless Nanoscale Etching

Author： Li Qiang   Liu Jie   Dai Yichuan   Xiang Wushu   Zhang Man   Wang Hai   Wen Li  

Publisher： MDPI

E-ISSN： 2072-666x|7|12|232-232

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.12, 2016-12, pp. : 232-232

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