Lead-Free Piezoelectric Diaphragm Biosensors Based on Micro-Machining Technology and Chemical Solution Deposition

Author: Li Xiaomeng   Wu Xiaoqing   Shi Peng   Ye Zuo-Guang  

Publisher: MDPI

E-ISSN: 1424-8220|16|1|69-69

ISSN: 1424-8220

Source: Sensors, Vol.16, Iss.1, 2016-01, pp. : 69-69

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Abstract