Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer

Author： Miao Xiaodan   Dai Xuhan   Huang Yi   Ding Guifu   Zhao Xiaolin  

Publisher： MDPI

E-ISSN： 1424-8220|16|5|634-634

ISSN： 1424-8220

Source： Sensors, Vol.16, Iss.5, 2016-05, pp. : 634-634

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