Prediction of the Strain Response of Poly-AlN/(100)Si Surface Acoustic Wave Resonator and Experimental Analysis

Author： Chen Shuo   You Zheng  

Publisher： MDPI

E-ISSN： 1424-8220|16|5|603-603

ISSN： 1424-8220

Source： Sensors, Vol.16, Iss.5, 2016-04, pp. : 603-603

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