Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect

Author： Ren Dongxu Zhao Huiying Zhang Chupeng Yuan Daocheng Xi Jianpu Zhu Xueliang Ban Xinxing Dong Longchao Gu Yawen Jiang Chunye

Publisher： MDPI

E-ISSN： 1424-8220|16|4|538-538

ISSN： 1424-8220

Source： Sensors, Vol.16, Iss.4, 2016-04, pp. : 538-538

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