Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams

Author： Du Xiaohui Liu Yifang Li Anlin Zhou Zhou Sun Daoheng Wang Lingyun

Publisher： MDPI

E-ISSN： 1424-8220|16|2|158-158

ISSN： 1424-8220

Source： Sensors, Vol.16, Iss.2, 2016-01, pp. : 158-158

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