Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings

Author: Zheng Wei   Li Peng   van den Hurk Remko   Evoy Stephane  

Publisher: MDPI

E-ISSN: 1424-8220|16|7|1080-1080

ISSN: 1424-8220

Source: Sensors, Vol.16, Iss.7, 2016-07, pp. : 1080-1080

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Abstract