Overview of 3D Micro- and Nanocoordinate Metrology at PTB

Author： Dai Gaoliang   Neugebauer Michael   Stein Martin   Bütefisch Sebastian   Neuschaefer-Rube Ulrich  

Publisher： MDPI

E-ISSN： 2076-3417|6|9|257-257

ISSN： 2076-3417

Source： Applied Sciences, Vol.6, Iss.9, 2016-09, pp. : 257-257

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