Effects of Sputtering Parameters on AlN Film Growth on Flexible Hastelloy Tapes by Two-Step Deposition Technique

Author： Peng Bin   Gong Dongdong   Zhang Wanli   Jiang Jianying   Shu Lin   Zhang Yahui  

Publisher： MDPI

E-ISSN： 1996-1944|9|8|686-686

ISSN： 1996-1944

Source： Materials, Vol.9, Iss.8, 2016-08, pp. : 686-686

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