Stacked Integration of MEMS on LSI

Author: Esashi Masayoshi   Tanaka Shuji  

Publisher: MDPI

E-ISSN: 2072-666x|7|8|137-137

ISSN: 2072-666x

Source: Micromachines, Vol.7, Iss.8, 2016-08, pp. : 137-137

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Abstract