Investigation of Antireflection Nb2O5 Thin Films by the Sputtering Method under Different Deposition Parameters

Author: Chen Kun-Neng   Hsu Chao-Ming   Liu Jing   Liou Yu-Chen   Yang Cheng-Fu  

Publisher: MDPI

E-ISSN: 2072-666x|7|9|151-151

ISSN: 2072-666x

Source: Micromachines, Vol.7, Iss.9, 2016-09, pp. : 151-151

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Abstract