SiC Solution Growth on Si Face with Extremely Low Density of Threading Screw Dislocations for Suppression of Polytype Transformation

Publisher： Trans Tech Publications

E-ISSN： 1662-9752|2017|897|24-27

ISSN： 0255-5476

Source： Materials Science Forum, Vol.2017, Iss.897, 2017-06, pp. : 24-27

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

The dissociation modes of threading screw dislocations in 4H-SiC

By Onda Shoichi   Watanabe Hiroki   Kitou Yasuo   Kondo Hiroyuki   Uehigashi Hideyuki   Hisada Yoshiki   Shiraishi Kenji   Saka Hiroyasu  

Philosophical Magazine Letters, Vol. 93, Iss. 10, 2013-10 ,pp. : 591-600

Taylor & Francis Ltd

Access to resources Recommend Favorite

Mapping of Threading Screw Dislocations in 4H n-Type SiC Wafers

By  

Materials Science Forum, Vol. 2016, Iss. 858, 2016-06 ,pp. : 376-379

Trans Tech Publications

Access to resources Recommend Favorite

Characterization of Threading Screw Dislocations of Burgers Vectors with A-Components in 4H-SiC

By  

Materials Science Forum, Vol. 2016, Iss. 858, 2016-06 ,pp. : 401-404

Trans Tech Publications

Access to resources Recommend Favorite

Formation of Basal Plane Dislocations Introduced by Collision of Macrosteps on Growth Surface during SiC Solution Growth

By  

Materials Science Forum, Vol. 2017, Iss. 897, 2017-06 ,pp. : 28-31

Trans Tech Publications

Access to resources Recommend Favorite

Evolution of Threading Edge Dislocations at Earlier Stages of PVT Growth for 4H-SiC Single Crystals

By  

Materials Science Forum, Vol. 2016, Iss. 858, 2016-06 ,pp. : 73-76

Trans Tech Publications

Access to resources Recommend Favorite