Influence of Growth Temperature on Site Competition Effects during Chemical Vapor Deposition of 4H-SiC Layers

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2017|897|79-82

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2017, Iss.897, 2017-06, pp. : 79-82

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Abstract