Structural, Electrical and Optical Properties of Ternary Al₂_xIn_2(1-_x₎O₃ Films Prepared by Metal Organic Chemical Vapor Deposition

Publisher： Trans Tech Publications

E-ISSN： 1662-9752|2017|898|1796-1803

ISSN： 0255-5476

Source： Materials Science Forum, Vol.2017, Iss.898, 2017-07, pp. : 1796-1803

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