Application of 3D Nanorelief Sharp-Edge Detection Method in the Optical Interference Microscope

Publisher: Trans Tech Publications

E-ISSN: 1662-7482|2017|870|34-40

ISSN: 1660-9336

Source: Applied Mechanics and Materials, Vol.2017, Iss.870, 2017-10, pp. : 34-40

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Abstract