Redistribution of Metallic Impurities in Si during Annealing and Oxidation: W and Fe

Publisher: Trans Tech Publications

E-ISSN: 1662-9507|2018|383|17-22

ISSN: 1012-0386

Source: Defect and Diffusion Forum, Vol.2018, Iss.383, 2018-03, pp. : 17-22

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Abstract