Effect of Abrasive Particle Size on Lapping of Sapphire Wafer by Fixed Abrasive Pad

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2018|764|106-114

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2018, Iss.764, 2018-03, pp. : 106-114

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Abstract