Effects of Negative Bias Voltage and Ratio of Nitrogen and Argon on the Structure and Properties of NbN Coatings Deposited by HiPIMS Deposition System

Author： Ding Jicheng   Zhang Tengfei   Mei Haijuan   Yun Je Moon   Jeong Seong Hee   Wang Qimin   Kim Kwang Ho  

Publisher： MDPI

E-ISSN： 2079-6412|8|1|10-10

ISSN： 2079-6412

Source： Coatings, Vol.8, Iss.1, 2017-12, pp. : 10-10

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