Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method

Author： Yu Jia-Cheng Zhou Zai-Fa Su Jia-Le Xia Chang-Feng Zhang Xin-Wei Wu Zong-Ze Huang Qing-An

Publisher： MDPI

E-ISSN： 2072-666x|9|2|74-74

ISSN： 2072-666x

Source： Micromachines, Vol.9, Iss.2, 2018-02, pp. : 74-74

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