Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

Author: Yang Jian   Si Chaowei   Yang Fan   Han Guowei   Ning Jin   Yang Fuhua   Wang Xiaodong  

Publisher: MDPI

E-ISSN: 2072-666x|9|2|81-81

ISSN: 2072-666x

Source: Micromachines, Vol.9, Iss.2, 2018-02, pp. : 81-81

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Abstract