Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System

Author： Zhang Jiahong   Chen Jianxiang   Li Min   Ge Yixian   Wang Tingting   Shan Peng   Mao Xiaoli  

Publisher： MDPI

E-ISSN： 2072-666x|9|3|104-104

ISSN： 2072-666x

Source： Micromachines, Vol.9, Iss.3, 2018-02, pp. : 104-104

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