A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates

Author: Fu Xiaorui   Xu Lizhong  

Publisher: MDPI

E-ISSN: 1424-8220|18|2|362-362

ISSN: 1424-8220

Source: Sensors, Vol.18, Iss.2, 2018-01, pp. : 362-362

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Abstract