Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy

Author： Li Chuang   Cordovilla Francisco   Jagdheesh R.   Ocaña José L.  

Publisher： MDPI

E-ISSN： 1424-8220|18|2|439-439

ISSN： 1424-8220

Source： Sensors, Vol.18, Iss.2, 2018-02, pp. : 439-439

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